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Introduction to semiconductor devices; crystal growth and wafer preparation; chemical and physical vapor deposition; oxidation; diffusion; ion implantation; lithography; etching;...
Fundamental properties; Process modeling ( ion implantation, diffusion & oxidation); Physical parameters ( mobility, generation and recombination rates, conductivity, ...); Analytical...
The course is taught under the title " MEMS, Microsensors and Microfabrication". The course is concerned with MEMS sensors and actuators and their coupled-physics concepts of operation. The...
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