Meta-materials approach to sensitivity enhancement of MEMS BAW resonant sensors
Conference Paper
Abbas,, X. Rottenberg • R. Jansen • V. Cherman • A. Witvrouw • H.A.C. Tilmans • M. Zanaty • A. Khaled • and M. . 2013
Conference Name:
Sensors, 2013
Conference Date:
Friday, November 1, 2013
Sponsoring Organization:
IEEE
