Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing

Journal Article
Verheyen, . Khaled, M. Raoof, V. Cherman , K. Jans , M. Abbas, Sh. Ebrahim, G. Bryce, P. . 2012
Magazine \ Newspaper: 
Microelectronics Reliability
Issue Number: 
9-10
Volume Number: 
52
Pages: 
2272-2277