The course is taught under the title " MEMS, Microsensors and Microfabrication". The course is concerned with MEMS sensors and actuators and their coupled-physics concepts of operation. The course introduces, from a practical approach, Microlithography and Microfabrication techniques utilized for realizing MEMS, microsensors and micromachined transducers. The course also introduces  Materials used in MEMS, microsensors and micromachined transducers.