Due to the attractive properties, diamond-like amorphous carbon (DLC) films have been developed as resist material for photo lithography and as hard coatings. For these applications flat surfaces are required. In this work, the surface morphology and the deposition mechanism of DLC films have been investigated. Using parallel plate r.f. plasma glow discharge, methane gas was decomposed for deposition of DLC films on the third electrode located perpendicularly to the two parallel plates.