EE-610 Semiconductor Characterization Techniques

Bulk, surface and interface parameters  electrical methods (resistivity, lifetime, mobility dopant, profile, physical methods (optical microscopy, TEM, SEM, Xray topography, ellipsometry. Chemical methods (NAA, mass spectroscopy, emission spectroscopy, Xray fluorescence, ion-microprobe, electron microprobe, photo-luminescence, infrared spectroscopy).

Course Materials