Substrate-dependent thermal conductivity of aluminum nitride thin-films processed at low temperature

Journal Article
Scudeller, B. E. Belkerk, S. Bensalem, A. Soussou, M. Carette, H. Al Brithen, M. A. Djouadi, and Y. . 2014
Magazine \ Newspaper: 
Applied Physics Letters
Issue Number: 
105
Volume Number: 
2014
Pages: 
221905