Meta-materials approach to sensitivity enhancement of MEMS BAW resonant sensors

Conference Paper
Abbas,, X. Rottenberg • R. Jansen • V. Cherman • A. Witvrouw • H.A.C. Tilmans • M. Zanaty • A. Khaled • and M. . 2013
Conference Name: 
Sensors, 2013
Conference Date: 
Friday, November 1, 2013
Sponsoring Organization: 
IEEE