Influence of the nonlinearity introduced by the Casmir Force on the Harmonic behavior of MEM resonators

Conference Paper
“, Zanaty, R. Jansen, M. Abbas, A. Witvrouw, H. A. C. Tilmans, X. Rottenberg, . 2012
Conference Name: 
The 2nd Saudi International Nanotechnology Conference (2SINC)2012,
Conference Location: 
Riyadh, Saudi Arabia
Conference Date: 
Thursday, November 1, 2012
Sponsoring Organization: 
IEEE