Influence of the nonlinearity introduced by the van der Waals forceon the behaviour of NEM resonators

Conference Paper
Rottenberg, M. Zanaty, R. Jansen, V. Rochus, M. Abbas, A. Witvrouw, H. A. C. Tilmans, X. . 2012
Conference Name: 
The 23rd Micromechanics and Microsystems Europe Workshop (MME 2012)
Conference Location: 
Ilmenau, Germany
Conference Date: 
Saturday, September 1, 2012